AIS 2300C

Description

Specification
ㆍResolution : 3.0nm at 30KeV, Allows Low KV Image Acquisition
   (from 0.2KeV)
ㆍMagnification : 10 ~ 300,000X (Max. 1,000,000X)
ㆍOptic Lens : Dual Slit Objective Lens
ㆍEmission Current : 120㎂ (Max. 200 ㎂ ) with Emission Current Gauge
ㆍDetector : ET-Detector with ET-BSE Mode
ㆍWorking Distance : Max. 60mm
ㆍAutomation Control : Auto Focus/ Dynamic Focus/ Gun Alignment,
   Wobble,  Auto-Stigmator/ Contrast & Brightness and Etc.
ㆍChamber Volume : 242 X 260 X 302 (L X W X H) mm³
ㆍSample Stage : 5-axis Manual - 60(X)x70(Y)x50(Z) – Motorization
   Tilt (-20 ~ 90˚), 360˚ Endless Rotation
   Sample Position Navigation(AIS2300C)
ㆍImage Shift : 125um(X-Y), Image Rotation 360˚
ㆍLow Vacuum Mode (Option)
ㆍSpectrum Analysis : EDX, WDX, EBSD, BSE Detector and Etc.

Features
ㆍEquipped with powerful "Analysis S/W" & "Measurement tool"
ㆍUser-friendly automation operating System
ㆍEquipped with ET-BSE detector for SE & BSE Image acquisition 
ㆍAllows Low KV image(from 0.6KV) for non-conductive sample
ㆍUpgraded scan speed & Pixel resolution
ㆍEquipped precision 3-Axis motorized stage (Micro Cordination)
ㆍCompact and Slim Design

AIS1800C

Description

Specification
ELECTRON OPTIC SYSTEM
1) Resolution                           7nm  @ 20KV,  5nm @30KV  - 세계 최고의 Mini SEM 분해능
2) Magnification                         10~Max 150,000배 (Option: 배율업그레이드)
3) Accelerating Voltage                 0.2KV~20kV (Option: 30KeV) Digital Zoom ; 2X, 4X, 8X
4) Electron Gun Type                    Tungsten Filament
5) Bias System                              Linked with Acc. Voltage plus continuous voltage control
6) Gun Alignment                          4 Pole Electromagnetic Type (Auto/Manual)
7) Condenser Lens                        Electromagnetic 2 stages
8) Objective Lens                          Electromagnetic 1 stages
9) Stigmator                                  8 Pole Electromagnetic Type
10) Detector                           Bar Type SE Detector (Secondary Electron Device)
11) Image Shift                               125um(X-Y) & 360° Rotation
12) Auto Function　                        Auto Focus, stigmatism, Auto Contrast/Brightness, Gun Alignment, etc. 
 
POWERFUL ANALYSIS S/W
1) Image Enhancemen                             Image Editing, Histogram, Frequence Filter, Bright, Gamma function, etc.
2) Analysis Tool　　　                              Particle Counter(Option)
3) Measurement　　 　                            AOI(Area-of-Interest) User Define Tracking
4) Multi-Focus, Tiling & etc.
 
STAGE SYSTEM
1) Movement (X/Y/Z)mm                         40/40/40 (for AIS1800C-X) 
2) Rotation : 360°
3) Tilt:0~60° 
4) AIS1800C-S Model                             20/20/30mm (for AIS1800C-S)/ Tilt : 45° & 90° / Rotation : 360° 
5) Option: Stage Motorization (for AIS1800C-X)
  
OPTION
1) BSED (Backscattered Electron Detector)
2) EDS   (Energy Dispersive Spectrometer)
3) Image Output : Inkjet Printer / Digital Printer   
4) Stage & Chamber Customization